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SEMI C27 : 2018

SEMI C27 : 2018

Current

Current

The latest, up-to-date edition.

SPECIFICATIONS AND GUIDELINES FOR HYDROCHLORIC ACID

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Pertains to standardize requirements for grades of hydrochloric acid used in the semiconductor industry and testing procedures to support those specifications.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C1-7, SEMI C11-6, SEMI C12-2, SEMI C7.2 & SEMI C8-2. (03/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI C44 : 2014 SPECIFICATIONS AND GUIDELINES FOR SULFURIC ACID
SEMI C1 : 2010 GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS

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