SEMI C3-1 : 93(R2001)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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STANDARD FOR ARGON (AR), BULK LIQUID, 99.998% QUALITY
01-03-2005
12-01-2013
It is specific to Argon (Ar), Bulk Liquid 99.998% Quality - used in the manufacture and processing of semiconductors and advanced electronic devices and circuits. A gas conforming to the specifications will commonly contain more of the major component than the minimum permissible limit or contain less of an impurity (or several impurities) than the SEMI C3 maximum permissible limit. In neither case shall the gas be considered as of higher quality than that defined by the specification. The intent of these specifications and the associated procedures is, on one hand, to assure that a gas is suitable for the common uses to which it may be put in the manufacture and processing of semiconductor devices and, on the other hand, to be consistent with contemporary manufacturing processes for that gas.
DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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DocumentType |
Standard
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PublisherName |
Semiconductor Equipment & Materials Institute
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Status |
Superseded
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SupersededBy |
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