• Shopping Cart
    There are no items in your cart

SEMI C3.15 : 93(R1999)

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

STANDARD FOR NITROGEN (N2) IN CYLINDERS 99.9992% QUALITY

Withdrawn date

23-07-2013

Published date

12-01-2013

Sorry this product is not available in your region.

Suppliers recognizing the importance of impurity content of gases in the manufacture of semiconductors, responded by introducing products with improved analytical characterization, notably for trace impurities. The following criteria was considered when determining the defined analytical method: Ease of Use; Accuracy; Maintenance; Reliability; Precision; Sensitivity; Versatility; and Availability of Equipment. Specification is specific to Nitrogen (N2), in Cylinders, 99.9992% Quality - used in the processing and manufacture of semiconductors etc. Gas complying with the specifications will commonly contain more of the major component than the minimum permissible limit or contain less of an impurity (or several impurities) than the SEMI C3 maximum permissible limit.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Withdrawn

ASTM F 1239 : 2002 Standard Test Methods for Oxygen Precipitation Characterization of Silicon Wafers by Measurement of Interstitial Oxygen Reduction (Withdrawn 2003)

Access your standards online with a subscription

Features

  • Simple online access to standards, technical information and regulations.

  • Critical updates of standards and customisable alerts and notifications.

  • Multi-user online standards collection: secure, flexible and cost effective.