SEMI C3.18 : 2002
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
STANDARD FOR DICHLOROSILANE (H2SICI2) IN CYLINDERS, 97% QUALITY
Superseded date
01-03-2005
Superseded by
Published date
12-01-2013
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Provides a specification for Dichlorosilane (SiH2Cl2) used in the semiconductor industry. It also covers requirements for Dichlorosilane (SiH2Cl2) used in the semiconductor industry.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
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