![header thumbnail](/images/publishers\semi_cover.gif)
SEMI C3.18 : 2002
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
![header thumbnail](/images/publishers\semi_cover.gif)
STANDARD FOR DICHLOROSILANE (H2SICI2) IN CYLINDERS, 97% QUALITY
Superseded date
01-03-2005
Published date
12-01-2013
Provides a specification for Dichlorosilane (SiH2Cl2) used in the semiconductor industry. It also covers requirements for Dichlorosilane (SiH2Cl2) used in the semiconductor industry.
Sorry this product is not available in your region.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.