SEMI C3-2 : 2011(R2018)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR ARSINE (ASH[3]) IN CYLINDERS, 99.94% QUALITY
Published date
12-01-2013
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Specifies specifications for arsine (AsH[3]) that is used in the semiconductor industry.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (12/2009)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI C3 : 2017 | SPECIFICATIONS FOR GASES |
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