![header thumbnail](/images/publishers\semi_cover.gif)
SEMI C3.20 : 2014(R2019)
Current
Current
The latest, up-to-date edition.
![header thumbnail](/images/publishers\semi_cover.gif)
SPECIFICATION FOR HELIUM (HE), IN CYLINDERS, 99.9995%
Published date
12-01-2013
Provides specifications for helium (He) that is used in the semiconductor industry. Also covers requirements for helium used in the semiconductor industry.
Sorry this product is not available in your region.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.