SEMI C3.20 : 2014(R2019)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR HELIUM (HE), IN CYLINDERS, 99.9995%
Published date
12-01-2013
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Provides specifications for helium (He) that is used in the semiconductor industry. Also covers requirements for helium used in the semiconductor industry.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Revision
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Standards | Relationship |
| SAC GB/T 16943 : 1997 | Identical |
| SEMI C3 : 2017 | SPECIFICATIONS FOR GASES |
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