SEMI C3.27 : 2002(R2018)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR BORON TRIFLUORIDE (BF[3]) IN CYLINDERS, 99.0% QUALITY
Published date
12-01-2013
Provides a specification for Boron Trifluoride (BF[3]) used in the semiconductor industry. Also describes requirements for Boron Trifluoride (BF[3]) used in the semiconductor industry.
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