SEMI C3.27 : 2002(R2018)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR BORON TRIFLUORIDE (BF[3]) IN CYLINDERS, 99.0% QUALITY
Published date
12-01-2013
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Provides a specification for Boron Trifluoride (BF[3]) used in the semiconductor industry. Also describes requirements for Boron Trifluoride (BF[3]) used in the semiconductor industry.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI C3 : 2017 | SPECIFICATIONS FOR GASES |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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