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SEMI C3.27 : 2002(R2018)

SEMI C3.27 : 2002(R2018)

Current

Current

The latest, up-to-date edition.

SPECIFICATION FOR BORON TRIFLUORIDE (BF[3]) IN CYLINDERS, 99.0% QUALITY

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Provides a specification for Boron Trifluoride (BF[3]) used in the semiconductor industry. Also describes requirements for Boron Trifluoride (BF[3]) used in the semiconductor industry.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI C3 : 2017 SPECIFICATIONS FOR GASES
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