SEMI C3.28 : 2000
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
STANDARD FOR NITROGEN (N2), VLSI GRADE, IN CYLINDERS, 99.9996% QUALITY
01-03-2003
12-01-2013
Suppliers recognizing the importance of impurity content of gases in the manufacture of semiconductors, responded by introducing products with improved analytical characterization, notably for trace impurities. The following criteria was considered when determining the defined analytical method: Ease of Use; Accuracy; Maintenance; Reliability; Sensitivity; Versatility; Precision; and Availability of Equipment. Specification is specific to Nitrogen (N2), VLSI Grade in Cylinders - used in the processing and manufacture of semiconductors etc. Gas complying with the specifications will commonly contain more of the major component than the minimum permissible limit or contain less of an impurity (or several impurities) than the SEMI C3 maximum permissible limit.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Withdrawn
|
| SEMI E49.7 : 2004E | PURITY GUIDE FOR THE DESIGN AND MANUFACTURE OF ULTRAPURE WATER AND LIQUID CHEMICAL SYSTEMS IN SEMICONDUCTOR PROCESS EQUIPMENT |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.