SEMI C3.30 : 96(R1999)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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STANDARD FOR HYDROGEN (H2), BULK, 99.9997% QUALITY
01-03-2005
12-01-2013
Standard is intended to establish the general procedures, definitions, specifications, and analytical procedures for hydrogen (H2), bulk, 99.9997% quality. Where an analytical procedure differs from that provided and is substituted by a user or supplier, the burden of proof is on said user or supplier to confirm the equivalency. The following criteria was considered when determining the defined analytical method: Ease of Use; Accuracy; Maintenance; Reliability; Sensitivity; Versatility; Precision; and Availability of Equipment. Standard falls under the general specification, SEMI C3, which is intended to serve for gases to be used in the processing and manufacture of semiconductors and advanced electronic circuits and devices.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
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