SEMI C3.31 : 2002
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
PROVISIONAL STANDARD FOR DICHLOROSILANE (H2SICI2) IN CYLINDERS, 99% QUALITY
01-03-2005
12-01-2013
Suppliers recognizing the importance of impurity content of gases in the manufacture of semiconductors, responded by introducing products with improved analytical characterization, notably for trace impurities. The following criteria was considered when determining the defined analytical method: Ease of Use; Accuracy; Maintenance; Reliability; Sensitivity, Precision; Versatility; and Availability of Equipment. Specification is specific to Dichlorosilane (H2SiCl2) in Cylinders, 99% Quality - used in the processing and manufacture of semiconductors etc. Gas complying with the specifications will commonly contain more of the major component than the minimum permissible limit or contain less of an impurity (or several impurities) than the SEMI C3 maximum permissible limit.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI C3 : 2017 | SPECIFICATIONS FOR GASES |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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