SEMI C3.34 : 2016
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR DISILANE (SI[2]H[6]) IN CYLINDERS, 97% QUALITY
Superseded date
15-10-2022
Superseded by
Published date
12-01-2013
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Specifies a specification for disilane (Si[2]H[6]) used in the semiconductor industry.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI C3 : 2017 | SPECIFICATIONS FOR GASES |
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