SEMI C3.38 : 1989
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
PROVISIONAL STANDARD FOR TUNGSTEN HEXAFLUORIDE (WF6), VLSI GRADE
01-06-1999
12-01-2013
Suppliers recognizing the importance of impurity content of gases in the manufacture of semiconductors, responded by introducing products with improved analytical characterization, notably for trace impurities. The following criteria was considered when determining the defined analytical method: Ease of Use; Accuracy; Maintenance; Reliability; Versatility; Sensitivity; Precision; and Availability of Equipment. Specification is specific to Tungsten Hexafluoride (WF6), VLSI Grade - used in the processing and manufacture of semiconductors and advanced electronic circuits and devices. Gas complying with the specifications will commonly contain more of the major component than the minimum permissible limit or contain less of an impurity (or several impurities) than the SEMI C3 maximum permissible limit.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. No longer available separately, included in SEMI C3. (02/2005)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
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