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SEMI C3.42 : 1990

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

PROVISIONAL STANDARD FOR ARGON (AR), VLSI GRADE, BULK

Superseded date

01-03-2005

Superseded by

SEMI C57 : 2017

Published date

12-01-2013

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Suppliers recognizing the importance of impurity content of gases in the manufacture of semiconductors, responded by introducing products with advanced analytical characterization, notably for trace impurities. The following criteria was considered when determining the defined analytical method: Ease of Use; Accuracy; Maintenance; Sensitivity; Versatility; Precision; Reliability; and Availability of Equipment. Specification is specific to Argon (Ar), VLSI Grade Bulk - used in the processing and manufacture of semiconductors and advanced electronic circuits and devices. Gas complying with the specifications will commonly contain more of the major component than the minimum permissible limit or contain less of an impurity (or several impurities) than the SEMI C3 maximum permissible limit.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

SEMI MF1723 : 2004 PRACTICE FOR EVALUATION OF POLYCRYSTALLINE SILICON RODS BY FLOAT-ZONE CRYSTAL GROWTH AND SPECTROSCOPY
SEMI E49.6 : 2003(R2011) GUIDE FOR SUBSYSTEM ASSEMBLY AND TESTING PROCEDURES - STAINLESS STEEL SYSTEMS
SEMI MF1708 : 2004 PRACTICE FOR EVALUATION OF GRANULAR POLYSILICON BY MELTER-ZONER SPECTROSCOPIES

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