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SEMI C3.46 : 2002

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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STANDARD FOR ARGON (AR), BULK LIQUID, 99.9992% QUALITY

Superseded date

01-03-2005

Superseded by

SEMI C57 : 2017

Published date

12-01-2013

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Provide a specification for Argon (Ar) used in the semiconductor industry. It also covers requirements for Argon (Ar) used in the semiconductor industry.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

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