SEMI C3.46 : 2002
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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STANDARD FOR ARGON (AR), BULK LIQUID, 99.9992% QUALITY
Superseded date
01-03-2005
Published date
12-01-2013
Provide a specification for Argon (Ar) used in the semiconductor industry. It also covers requirements for Argon (Ar) used in the semiconductor industry.
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