SEMI C3.49 : 1994
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
STANDARD FOR BULK NITROGEN (N2) 99.99999% QUALITY
01-03-2003
12-01-2013
Suppliers recognizing the importance of impurity content of gases in the manufacture of semiconductors, responded by introducing products with advanced analytical characterization, notably for trace impurities. The following criteria was considered when determining the defined analytical method: Ease of Use; Accuracy; Maintenance; Sensitivity; Versatility; Precision; Reliability; and Availability of Equipment. Specification is specific to Bulk Nitrogen (N2) 99.99999% Quality - used in the processing and manufacture of semiconductors and advanced electronic circuits and devices. Gas complying with the specifications will commonly contain more of the major component than the minimum permissible limit or contain less of an impurity (or several impurities) than the SEMI C3 maximum permissible limit.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Withdrawn
|
| SEMI F76 : 2003(R2018) | TEST METHOD FOR EVALUATION OF PARTICLE CONTRIBUTION FROM GAS SYSTEM COMPONENTS EXPOSED TO CORROSIVE GAS |
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