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SEMI C3-5 : 93(R1999)

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

STANDARD FOR NITROGEN (N[2]), BULK LIQUID, 99.998% QUALITY

Withdrawn date

01-03-2003

Published date

12-01-2013

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It is specific to Nitrogen (N2), Bulk Liquid, 99.998% Quality - used in the manufacture and processing of semiconductors and advanced electronic devices and circuits. A gas conforming to the specifications will commonly contain more of the major component than the minimum permissible limit or contain less of an impurity (or several impurities) than the SEMI C3 maximum permissible limit. In neither case shall the gas be considered as of higher quality than that defined by the specification. The intent of these specifications and the associated procedures is, on one hand, to assure that a gas is suitable for the common uses to which it may be put in the manufacture and processing of semiconductor devices and, on the other hand, to be consistent with contemporary manufacturing processes for that gas.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Withdrawn

ASTM F 1535 : 2000 Standard Test Method for Carrier Recombination Lifetime in Silicon Wafers by Noncontact Measurement of Photoconductivity Decay by Microwave Reflectance (Withdrawn 2003)

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