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SEMI C3.50 : 2000

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

STANDARD FOR NITROUS OXIDE (N[2]0), 99.9994% QUALITY

Superseded date

01-03-2005

Superseded by

SEMI C60 : 2017

Published date

12-01-2013

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Provisional standard intended to establish the general procedures, definitions, specifications, and analytical procedures for nitrous oxide (N2O), 99.9994% quality. Where an analytical procedure differs from that provided and is substituted by a user or supplier, the burden of proof is on said user or supplier to confirm the equivalency. The following criteria was considered when determining the defined analytical method: Ease of Use; Maintenance; Sensitivity; Reliability; Versatility; Precision; Accuracy; and Availability of Equipment. Standard falls under general specification, SEMI C3, which is intended to serve for gases to be used in the processing and manufacture of semiconductors and advanced electronic circuits and devices.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

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