SEMI C3-6 : 2010(R2015)
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR PHOSPHINE (PH3) IN CYLINDERS, 99.98% QUALITY
Superseded date
07-06-2021
Superseded by
Published date
12-01-2013
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Gives specifications for phosphine (PH3) that are used in the semiconductor industry.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (01/2003)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI M51 : 2012 | TEST METHOD FOR CHARACTERIZING SILICON WAFER BY GATE OXIDE INTEGRITY |
| SEMI C3 : 2017 | SPECIFICATIONS FOR GASES |
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