SEMI C3.6:2021
Current
Current
The latest, up-to-date edition.
Specification for Phosphine (PH3) in Cylinders, 99.98% Quality
Available format(s)
Hardcopy
Language(s)
English
Published date
01-04-2021
Important note : Users cannot be edited or removed once added to your Multi user PDF.The purpose of this Document is to provide specifications for phosphine (PH3) that are used in the semiconductor industry.
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
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