SEMI C3 PT2 : *DUPLICATE RECORD*
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
**DUPLICATE RECORD**
Superseded date
02-04-2017
Published date
12-01-2013
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Specifies specifications for arsine (AsH[3]) that is used in the semiconductor industry.
| DevelopmentNote |
This is a duplicate record, which will be removed from the database after three months. (03/2017)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SEMI C3 : 2017 | SPECIFICATIONS FOR GASES |
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