SEMI C3 PT2 : *DUPLICATE RECORD*
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
**DUPLICATE RECORD**
Superseded date
02-04-2017
Published date
12-01-2013
Specifies specifications for arsine (AsH[3]) that is used in the semiconductor industry.
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