SEMI C30 : 2018
Current
Current
The latest, up-to-date edition.
SPECIFICATIONS FOR HYDROGEN PEROXIDE
Published date
12-01-2013
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Describes standardize requirements for hydrogen peroxide used in the semiconductor industry and testing procedures to support those standards.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C1-9, SEMI C11-4, SEMI C12-4, SEMI C7.5 & SEMI C8-5. (03/2005)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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