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SEMI C35 : 2018

Current

Current

The latest, up-to-date edition.

SPECIFICATIONS AND GUIDELINE FOR NITRIC ACID

Published date

12-01-2013

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Describes requirements for nitric acid used in the semiconductor industry and testing procedures to support those standards.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C1.12, SEMI C7.6 & SEMI C8.6. (03/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI C44 : 2014 SPECIFICATIONS AND GUIDELINES FOR SULFURIC ACID
SEMI C1 : 2010 GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS

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