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SEMI C35 : 2018

SEMI C35 : 2018

Current

Current

The latest, up-to-date edition.

SPECIFICATIONS AND GUIDELINE FOR NITRIC ACID

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Describes requirements for nitric acid used in the semiconductor industry and testing procedures to support those standards.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C1.12, SEMI C7.6 & SEMI C8.6. (03/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI C44 : 2014 SPECIFICATIONS AND GUIDELINES FOR SULFURIC ACID
SEMI C1 : 2010 GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS

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