SEMI C37 : 2006(R2011)
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR PHOSPHORIC ETCHANTS
Published date
12-01-2013
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Describes requirements for phosphoric etchants used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C2-3. (03/2005) Also available in CD-ROM. (07/2006)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI C2 : 1995 | SPECIFICATIONS FOR ETCHANTS |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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