SEMI C38 : 2012
Current
Current
The latest, up-to-date edition.
GUIDE FOR PHOSPHORUS OXYCHLORIDE
Published date
12-01-2013
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Gives a guide for a grade of phosphorus oxychloride for which a need has been identified.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C7.12. (03/2005)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI M51 : 2012 | TEST METHOD FOR CHARACTERIZING SILICON WAFER BY GATE OXIDE INTEGRITY |
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