SEMI C45 : 2009E
Current
Current
The latest, up-to-date edition.
SPECIFICATION AND GUIDELINE FOR TETRAETHYLORTHOSILICATE (TEOS)
Published date
12-01-2013
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Specifies requirements for tetraethylorthosilicate used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Related to all grades of tetraethylorthosilicate used in the semiconductor industry.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C7.13. (03/2005) Also available in CD-ROM. (02/2009) E = This standard was editorially modified to correct an error. (12/2009)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| Supersedes |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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