SEMI C45 : 2009E
Current
Current
The latest, up-to-date edition.
SPECIFICATION AND GUIDELINE FOR TETRAETHYLORTHOSILICATE (TEOS)
Published date
12-01-2013
Specifies requirements for tetraethylorthosilicate used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Related to all grades of tetraethylorthosilicate used in the semiconductor industry.
Sorry this product is not available in your region.
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.