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SEMI C47 : 2012

SEMI C47 : 2012

Current

Current

The latest, up-to-date edition.

GUIDE FOR TRANS 1,2 DICHLOROETHYLENE

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a guide for a grade of trans 1,2 dichloroethylene for which a need has been identified.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C7.20. (03/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

I.S. EN 16603-35-06:2014 SPACE ENGINEERING - CLEANLINESS REQUIREMENTS FOR SPACECRAFT PROPULSION HARDWARE
BS EN 16603-35-06:2014 Space engineering. Cleanliness requirements for spacecraft propulsion hardware
EN 16603-35-06:2014 Space engineering - Cleanliness requirements for spacecraft propulsion hardware

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