SEMI C48 : 2012
Current
Current
The latest, up-to-date edition.
SPECIFICATION AND GUIDE FOR 1,1,1-TRICHLOROETHANE, FURNACE GRADE
Published date
12-01-2013
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Specifies requirements for 1,1,1-Trichloroethane, Furnace Grade used in the semiconductor industry and testing procedures to support those standards.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Supersedes SEMI C1.26 & SEMI C7.15. (03/2005)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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