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SEMI C48 : 2012

SEMI C48 : 2012

Current

Current

The latest, up-to-date edition.

SPECIFICATION AND GUIDE FOR 1,1,1-TRICHLOROETHANE, FURNACE GRADE

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies requirements for 1,1,1-Trichloroethane, Furnace Grade used in the semiconductor industry and testing procedures to support those standards.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Supersedes SEMI C1.26 & SEMI C7.15. (03/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

SEMI C1 : 2010 GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS

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