SEMI C49 : 2010
Current
Current
The latest, up-to-date edition.
GUIDE FOR TRIMETHYLBORATE
Published date
12-01-2013
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Specifies requirements for trimethylborate used in the semiconductor industry and testing procedures to support those standards. Also specifies a guide for grades of trimethylborate for which an industry need has been identified.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes SEMI C7.21. (03/2005)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| Supersedes |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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