SEMI C53 : 2004(R2012)
Current
Current
The latest, up-to-date edition.
SPECIFICATIONS FOR DIMETHYL SULFOXIDE (DMSO) [GRADES 1 AND 2]
Published date
12-01-2013
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Provides the requirements for dimethyl sulfoxide used in the semiconductor industry and testing procedures to support those standards.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (11/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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