SEMI C55 : 2004(R2018)

Current

Current The latest, up-to-date edition.

SPECIFICATION FOR LIQUID CARBON DIOXIDE (CO[2]) USED IN NEAR CRITICAL, CRITICAL AND SUPERCRITICAL APPLICATIONS, >/ 99.99% QUALITY

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Published date: 12-01-2013

Publisher: Semiconductor Equipment & Materials Institute

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Gives a specification for liquid carbon dioxide (CO[2]) that is used in near critical, critical and supercritical applications in the semiconductor industry.

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Development Note	Not available for sale from ILI, customer to contact SEMI. (10/2004)
Document Type	Standard
ISBN
Pages
Published
Publisher	Semiconductor Equipment & Materials Institute
Status	Current

Standards Referencing This Book - (Show below) - (Hide below)

SEMI C10 : 2009(R2014)	GUIDE FOR DETERMINATION OF METHOD DETECTION LIMITS
SEMI C15 : 2016	TEST METHOD FOR PPM AND PPB HUMIDITY STANDARDS
SEMI F33 : 2008	TEST METHOD FOR CALIBRATION OF ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETER (APIMS)

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