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  • SEMI C10 : 2009(R2014)

    Current The latest, up-to-date edition.

    GUIDE FOR DETERMINATION OF METHOD DETECTION LIMITS

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    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Specifies a minimal set of guidelines for the quantitative determination of a method detection limit (MDL) from data supporting a SEMI Process Chemicals or Gases specification.

    General Product Information - (Show below) - (Hide below)

    Development Note Not available for sale from ILI, customer to contact SEMI. (05/2001) Supersedes and includes SEMI C10.1. (02/2005)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Current
    Supersedes

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