SEMI C56 : 2016
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR DICHLOROSILANE
Superseded date
12-03-2024
Superseded by
Published date
12-01-2013
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Gives a series of specifications for different grades of dichlorosilane (SiH[2]Cl[2]) that are used in the semiconductor industry.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Supersedes SEMI C3.18 & SEMI C3.31. (02/2005)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy | |
| Supersedes |
| SEMI C3 : 2017 | SPECIFICATIONS FOR GASES |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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