SEMI C56 : 2016
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATION FOR DICHLOROSILANE
Superseded date
12-03-2024
Published date
12-01-2013
Gives a series of specifications for different grades of dichlorosilane (SiH[2]Cl[2]) that are used in the semiconductor industry.
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