SEMI C57 : 2017
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR ARGON
Published date
12-01-2013
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Specifies a series of specifications for different grades of argon (Ar) that are used in the semiconductor industry.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Supersedes SEMI C3-1, SEMI C3.42 & SEMI C3.46. (02/2005)
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| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| Supersedes |
| SEMI F70 : 2011(R2017) | TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM |
| SEMI C3 : 2017 | SPECIFICATIONS FOR GASES |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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