SEMI C6-5 : 1990(R2011)
Current
Current
The latest, up-to-date edition.
PARTICLE SPECIFICATION FOR GRADE 10/0.2 NITROGEN (N[2]) AND ARGON (AR) DELIVERED AS PIPELINE GAS
Published date
12-01-2013
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Sets a maximum permissible particle concentration for 10/0.2 grade nitrogen and argon bulk supply gases, and describes a reference method for its verification.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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| SEMI E104 : 2003 | SPECIFICATION FOR INTEGRATION AND GUIDELINE FOR CALIBRATION OF LOW-PRESSURE PARTICLE MONITOR |
| SEMI F24 : 2017 | SPECIFICATION FOR PARTICLE CONCENTRATION OF GRADE 10/0.2 INERT SPECIALTY GASES |
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