SEMI C6-5 : 1990(R2011)
Current
Current
The latest, up-to-date edition.
PARTICLE SPECIFICATION FOR GRADE 10/0.2 NITROGEN (N[2]) AND ARGON (AR) DELIVERED AS PIPELINE GAS
Published date
12-01-2013
Sets a maximum permissible particle concentration for 10/0.2 grade nitrogen and argon bulk supply gases, and describes a reference method for its verification.
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