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SEMI C6-6 : 1990(R2011)

SEMI C6-6 : 1990(R2011)

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Current

The latest, up-to-date edition.

PARTICLE SPECIFICATION FOR GRADE 10/0.1 NITROGEN (N[2]) AND ARGON (AR) DELIVERED AS PIPELINE GAS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Sets a maximum permissible particle concentration for 10/0.1 grade nitrogen and argon bulk supply gases, and provides a reference method for its verification.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

SEMI E104 : 2003 SPECIFICATION FOR INTEGRATION AND GUIDELINE FOR CALIBRATION OF LOW-PRESSURE PARTICLE MONITOR

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