SEMI C60 : 2017
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR NITROUS OXIDE
Published date
12-01-2013
Sorry this product is not available in your region.
Defines a series of specifications for different grades of nitrous oxide (N[2]O) that are used in the semiconductor industry.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Supersedes SEMI C3.13 & SEMI C3.50. (02/2005)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| Supersedes |
| SEMI C3 : 2017 | SPECIFICATIONS FOR GASES |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.