SEMI C62 : 2009
Current
Current
The latest, up-to-date edition.
SPECIFICATION FOR PROGEN PRECURSORS USED IN LOW K CVD PROCESSES
Published date
12-01-2013
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Provides specifications for porogen precursors used in Low K CVD processes for which a need has been identified. Also describes the proposed impurity limits for porogen precursors (e.g., Alpha-Terpinine, Limonene, Bicycloheptadiene, and Cyclooctane) used in the semiconductor industry.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (10/2007)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SupersededBy |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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