SEMI C63 : 2008
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION FOR ORGANOSILICATE PRECURSORS USED IN LOW K CVD PROCESSES
Superseded date
06-11-2018
Superseded by
Published date
12-01-2013
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Provides guidelines for organosilicate precursors used in Low K CVD processes and to standardize testing procedures to support those requirements.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. Also available in CD-ROM. (10/2007)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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