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SEMI C63 : 2008
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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SPECIFICATION FOR ORGANOSILICATE PRECURSORS USED IN LOW K CVD PROCESSES
Superseded date
06-11-2018
Published date
12-01-2013
Provides guidelines for organosilicate precursors used in Low K CVD processes and to standardize testing procedures to support those requirements.
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