SEMI C66 : 2017
Current
Current
The latest, up-to-date edition.
GUIDE FOR TRIMETHYLALUMINIUM (TMAI), 99.5% QUALITY
Published date
12-01-2013
Sorry this product is not available in your region.
Specifies a guide for trimethylaluminum (TMAl) used in the semiconductor industry.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (02/2008)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
| SEMI C1 : 2010 | GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS |
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