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SEMI C7.19 : 1995

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

GUIDELINE FOR MIXED ACID ETCHANTS, TIER A

Superseded date

01-06-1999

Superseded by

SEMI C34 : 2013(R 2019)

Published date

12-01-2013

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Specific to Mixed Acid Etchants, Tier A. Tier A refers to first generation Guidelines. Tier A Guidelines are intended to describe the quality required to produce IC's whose critical dimensions lie in the range of 0.8 to 1.2 microns and greater, with most trace metal specifications near 10 ppb. They are designated by "SEMI C7._" and in general become Grade 2 standards upon approval of a validated analytical quality control method. Tier A Guidelines were developed by the North American Process Chemicals Committee, and approved through SEMI's International ballot methods.

DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

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