SEMI C7.23 : 1997
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
STANDARD FOR BUFFERED OXIDE ETCHANTS, GRADE 2
01-03-2001
12-01-2013
Intended to establish the general procedures, specifications, definitions, and analytical procedures for buffered oxide etchants, Grade 2. Products within all of the requirements can be described as "meeting SEMI specifications." Where analytical procedure differs from that provided and is substituted by a user or supplier, the burden of proof is on said user or supplier to confirm the equivalency.
| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
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| SupersededBy |
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