SEMI C7.24 : 1997
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
STANDARD FOR PHOSPHORIC ACID, GRADE 2
01-03-2001
12-01-2013
Intended to establish the general procedures, specifications, definitions, and analytical procedures for phosphoric acid, Grade 2. Products within all of the requirements can be described as "meeting SEMI specifications." Where analytical procedure differs from that given and is substituted by a user or supplier, the burden of proof is on said user or supplier to confirm the equivalency.
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.