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SEMI C7.24 : 1997

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

STANDARD FOR PHOSPHORIC ACID, GRADE 2

Superseded date

01-03-2001

Published date

12-01-2013

Intended to establish the general procedures, specifications, definitions, and analytical procedures for phosphoric acid, Grade 2. Products within all of the requirements can be described as "meeting SEMI specifications." Where analytical procedure differs from that given and is substituted by a user or supplier, the burden of proof is on said user or supplier to confirm the equivalency.

DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

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