SEMI C7.3 : 1993
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
STANDARD FOR HYDROFLUORIC ACID, GRADE 2
01-07-2004
12-01-2013
Specific to Hydrofluoric Acid, Grade 2. Tier A refers to first generation Guidelines. Tier A Guidelines are intended to describe the quality required to produce IC's whose critical dimensions lie in the range of 0.8 to 1.2 microns and greater, with most trace metal specifications near 10 ppb. They are designated by "SEMI C7._"and generally become Grade 2 standards upon approval of a validated analytical quality control method. Tier A Guidelines were developed by the North American Process Chemicals Committee, and approved through SEMI's International ballot procedures.
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Superseded
|
| SupersededBy |
| SEMI M33 : 1998 | TEST METHOD FOR THE DETERMINATION OF RESIDUAL SURFACE CONTAMINATION ON SILICON WAFERS BY MEANS OF TOTAL REFLECTION X-RAY FLUORESCENCE SPECTROSCOPY (TXRF) |
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