SEMI C71 : 2015
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
View Superseded by
SPECIFICATION AND GUIDE FOR BORON TRICHLORIDE (BCI[3])
Superseded date
07-06-2021
Superseded by
Published date
12-01-2013
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Gives specification and guide for boron trichloride (BCl[3]) that are used in the semiconductor industry.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (07/2011)
|
| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Superseded
|
| SupersededBy |
| SEMI C3 : 2017 | SPECIFICATIONS FOR GASES |
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